Publisher Correction: Engineering bacterial vortex lattice via direct laser lithography
نویسندگان
چکیده
منابع مشابه
Laser scanner for direct writing lithography.
A laser scanner and a stepping xy stage have been developed for direct writing lithography in the micron and the submicron range. System design is described and examples of exposed photoresist with a structure size of 1 microm are presented.
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ژورنال
عنوان ژورنال: Nature Communications
سال: 2018
ISSN: 2041-1723
DOI: 10.1038/s41467-018-07443-z